Wafer Transfer System
Simplified mold wafer transfer system
Wafers | SEMI/JEITA 6-inch (OF) / 8-inch (Notch) Rear side suction |
---|---|
Cassette | 6-inch slot pitch 4.7625 mm 25 slots 8-inch slot pitch 6.35 mm 25 slots |
Transfer time | Approx 8 minutes including alignment / Approx 3 minutes without alignment (excluding time for mapping) |
Safety mechanism | EMO switch Light curtain(Cassette stage) Cassette position sensor Wafer ejection sensor Door/Cover ajar sensor LED indicating lamp(3 colors /4 colors) |
OCR | Please feel free to contact us if you have special characters. |
Dimensions | W: 840 mm x D: 700 mm x H: 1,278 mm (The indicating lamp, monitor and button not included) |
Weight | Approx 80 Kg |
Power source | AC100 V ±10%, 10 A |
Air | 0.5 MPa or higher |
Vacuum | -53 kPa or lower |

Special wafer transfer system
We can offer customized wafer transfer equipment accommodating special wafers ( such as laminated wafers ) and cassettes.
