Wafer Transfer System
Simplified mold wafer transfer system
| Wafers | SEMI/JEITA 6-inch (OF) / 8-inch (Notch) Rear side suction |
|---|---|
| Cassette | 6-inch slot pitch 4.7625 mm 25 slots 8-inch slot pitch 6.35 mm 25 slots |
| Transfer time | Approx 8 minutes including alignment / Approx 3 minutes without alignment (excluding time for mapping) |
| Safety mechanism | EMO switch Light curtain（Cassette stage） Cassette position sensor Wafer ejection sensor Door/Cover ajar sensor LED indicating lamp（3 colors /4 colors） |
| OCR | Please feel free to contact us if you have special characters. |
| Dimensions | W: 840 mm x D: 700 ｍｍ x H: 1,278 ｍｍ (The indicating lamp, monitor and button not included) |
| Weight | Approx 80 Kg |
| Power source | AC100 V ±10％, 10 A |
| Air | 0.5 MPa or higher |
| Vacuum | -53 kPa or lower |
Special wafer transfer system
We can offer customized wafer transfer equipment accommodating special wafers ( such as laminated wafers ) and cassettes.
