Wafer Visual Inspection System

Compatible wafer:
　300 mm silicon wafer

Compatible cassette:
　FOUP, AUTO FOSB

Features
　・Transfers wafers without contacting their surfaces by edge clip hands
　・Automatically feeds wafers to the inspection stage
　・Locations to be inspected can be memorized
　・Wafer's inspection position can be modified (tilt/turn/X-Y directions) by manual operation