Wafer Visual Inspection System
300mm wafer visual inspection system
Compatible wafer:
300 mm silicon wafer
Compatible cassette:
FOUP, AUTO FOSB
Features
・Transfers wafers without contacting their surfaces by edge clip hands
・Automatically feeds wafers to the inspection stage
・Locations to be inspected can be memorized
・Wafer's inspection position can be modified (tilt/turn/X-Y directions) by manual operation
300 mm silicon wafer
Compatible cassette:
FOUP, AUTO FOSB
Features
・Transfers wafers without contacting their surfaces by edge clip hands
・Automatically feeds wafers to the inspection stage
・Locations to be inspected can be memorized
・Wafer's inspection position can be modified (tilt/turn/X-Y directions) by manual operation
