Reticle Transfer & Storage

Compatible reticle:
・6-inch

Compatible reticle case:
・Various mask makers, NIKON, CANON, RSP (Multi/Single)

Features:
・Safe and clean transfer, with functions to prevent dropping and dragging out
・Accepts various photo mask/reticle cases and photolithography machine cassettes
・Able to read/write RF-TAG and read reticle IDs
・Specialized lighting on the visual inspection stage
・Automatic cleaning with air blow (blowing pressure automatically changes for pellicle sides）
・Clean plumbing free of materials with concerns about chemical pollution
・Reduces maintenance by adoption of brushless motors and combinations of simplex robots.

Compatible reticle:
・5-inch, 6-inch

Compatible reticle case:
・NIKON, CANON
・Please ask about other manufacturers' cases.

Features:
・Specialized lighting on the visual inspection stage
・Blow gun for removing particles
・Easy operation

Compatible reticle cases:
・6-inch　NIKON  / CANON
・9-inch　NIKON

Features:
・Managing the storing shelves by case IDs (bar code, QR code etc.)
・Prevention of jumping out of the case caused by earthquakes.
・Even if a system trouble occurs, reticle cases can be extracted easily from the inside chamber.