Reticle Transfer & Storage
8600-series Reticle Transfer System
(with auto blow cleaning and visual inspection)
Compatible reticle:
・6-inch
Compatible reticle case:
・Various mask makers, NIKON, CANON, RSP (Multi/Single)
Features:
・Safe and clean transfer, with functions to prevent dropping and dragging out
・Accepts various photo mask/reticle cases and photolithography machine cassettes
・Able to read/write RF-TAG and read reticle IDs
・Specialized lighting on the visual inspection stage
・Automatic cleaning with air blow (blowing pressure automatically changes for pellicle sides)
・Clean plumbing free of materials with concerns about chemical pollution
・Reduces maintenance by adoption of brushless motors and combinations of simplex robots.

REC-series Reticle Transfer System
Compatible reticle:
・5-inch, 6-inch
Compatible reticle case:
・NIKON, CANON
・Please ask about other manufacturers' cases.
Features:
・Specialized lighting on the visual inspection stage
・Blow gun for removing particles
・Easy operation

Reticle Case Stocker
Compatible reticle cases:
・6-inch NIKON / CANON
・9-inch NIKON
Features:
・Managing the storing shelves by case IDs (bar code, QR code etc.)
・Prevention of jumping out of the case caused by earthquakes.
・Even if a system trouble occurs, reticle cases can be extracted easily from the inside chamber.
